1. Measure Range: X axis 100 mm and Z axis 13 mm (with LH=50 mm Stylus) X axis stroke 100 mm and Z column 450 mm
2. Base: Width 700 mm and Depth 450
3. Environment temperature 20 ±5 °C
4. Resolution 0.016 μm
5. Speed : X axis : Axis 100mm/s
6. Column : 50mm/s
7. Accuracy With LH=50 mm Stylus : Acc Z Axis = ±(1.0+|2H|/100) (H: Measuring height mm) at 20±2
8. Acc X Axis = ±(0.8+1.0L/100) (L: Measuring length mm)
9. Straightness Acc = (0.05+1.0L/1000) (with LH=50 mm Stylus)